In the dust-free cleanrooms of semiconductor manufacturing, lithography machines meticulously etch nanoscale circuit patterns onto silicon wafers with astonishing precision. This process relies on deep ultraviolet lithography technology, which in turn depends on a crucial medium: excimer laser gas. Like an “invisible partner” to the lithography process, it provides stable light source support for chip fabrication.

Yueyang Kaimite Electronic Special Rare Gases Co., Ltd. is a key player in this field.

Deeply cultivating electronic specialty gases to serve high-end manufacturing.

Yueyang Kaimite Electronic Special Rare Gas Co., Ltd. was established in 2018 and is located in Qilishan, Yueyanglou District, Yueyang City, Hunan Province. With a registered capital of 80 million yuan, the company is dedicated to the research, development, and production of electronic specialty gases. Relying on the industrial layout and technological expertise of its shareholders, the company is committed to expanding into the fields of electronics and specialty gases, and to building a research and production base for electronic specialty gases that wields considerable influence.

The company’s investment in an electronic specialty gas project utilizes technologies and equipment such as deep‑cooling distillation and physicochemical adsorption, with plans to build 25 production and processing units for electronic specialty gases and mixed gases. The first phase of the project has already completed construction of 12 production and auxiliary units, with a product portfolio that covers high‑purity gases including neon (5N), helium (6N), krypton (5N), xenon (5N/6N), hydrogen (6N), carbon dioxide (7N), carbon monoxide (5N), nitrogen (6N), and argon (6N), as well as hydrogen chloride–based laser mixtures, fluorine‑based molecular laser mixtures, and other dynamic laser mixtures.

Core Product: “Custom‑Made” for Excimer Lasers

Excimer laser gases are a crucial component of the company’s product portfolio, commonly referred to in the industry as lithography gases or laser gases. These gases primarily consist of precise mixtures of inert gases such as krypton (Kr), argon (Ar), and xenon (Xe), along with halogen gases like fluorine (F₂) and chlorine (Cl₂), which, when electrically excited, generate ultraviolet light at specific wavelengths.

ArF Excimer Laser (193 nm): Used in advanced lithography processes, it is the core light source for deep ultraviolet lithography.

KrF Excimer Laser (248 nm): Widely used in chip manufacturing and mask fabrication for mature process technologies.

XeCl Excimer Laser (308 nm): In addition to industrial processing, it is also used in fields such as medicine.

The purity and precise ratio of these mixed gases directly affect lithographic resolution and chip yield. Relying on advanced production and analytical testing capabilities, the company ensures that impurity control and component stability meet the process requirements of semiconductor manufacturing.

Gain international certification and enter the global supply chain.

In May 2025, Yueyang Kaimite Electronic Special Rare Gas Co., Ltd. received a Qualified Supplier Certification Letter from GIGAPHOTON Co., Ltd. of Japan. The company’s lithography gas products (Kr/Ne, Ar/Ne/Xe) have officially passed GIGAPHOTON’s qualified supplier certification, with the certificate valid until April 24, 2030.

GIGAPHOTON is a developer and manufacturer of excimer lasers for semiconductor lithography, as well as excimer lasers for other applications and extreme ultraviolet (EUV) lithography. As one of the world’s leading manufacturers of exposure excimer lasers, GIGAPHOTON boasts a broad customer base in both Asian markets and the Americas and Europe.

The successful completion of this certification demonstrates that the company’s production capabilities and product quality in the field of lithography gas production have been recognized by mainstream international equipment manufacturers. It also reflects the company’s comprehensive strengths in areas such as product manufacturing technology, steel cylinder inner wall treatment technology, and gas analysis technology. This certification will help the company enhance its influence in the lithography gas sector and create favorable conditions for expanding its lithography gas product sales business.

From “Gas Usage” to “Service”: Providing Customized Solutions

As semiconductor processes advance to more cutting‑edge nodes, the demand for electronic specialty gases in wafer fabrication is trending toward greater diversification and customization. Yueyang Kaimite Electronic Special Rare Gas Co., Ltd. not only offers laser gas mixtures that meet standard specifications, but also develops customized gas blending solutions tailored to customers’ specific process requirements.

The company possesses both electronic-grade cylinder handling capabilities and high‑purity gas analysis expertise, establishing a relatively complete technological closed loop that spans gas purification, blending, filling, and testing. This integrated service model helps downstream customers optimize their supply chain management and enhance the operational stability of their production lines.

Industry Value: Supporting the Steady Development of Domestic Supply Chains

In recent years, the domestic market for electronic specialty gases has continued to expand. According to statistics, in 2024, the sales revenue of domestic electronic gas companies reached 19.6 billion yuan, an increase of 12.6% over the previous year. The semiconductor manufacturing process is placing ever-higher demands on the autonomy and controllability of the gas supply chain.

As an electronic specialty gas manufacturer based in Hunan, Yueyang Kaimite Electronic Special Rare Gas Co., Ltd. has continuously invested in technology and expanded production capacity to provide critical material support for local industries such as semiconductors and display panels. The company’s excimer laser gas products have been added to the supplier lists of overseas excimer laser equipment manufacturers, with the potential to gradually achieve domestic substitution.

The precision of lithography processes affects chip performance, while the quality of excimer laser gas is crucial to the stable output of lithography machines. Yueyang Kaimete Electronic Special Rare Gas Co., Ltd. will continue to deepen its expertise in the field of electronic specialty gases, providing reliable products and technical services to support the high‑quality development of the semiconductor industry.